Simulation and experimental characterization of compact out-of-plane focusing grating couplers on 220 nm-SOI platform

Becker, HannaHannaBeckerKruckel, ClemensClemensKruckelVan Thourhout, DriesDriesVan ThourhoutHeck, Martijn J.T.Martijn J.T.Heck2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32508Simulation and experimental characterization of compact out-of-plane focusing grating couplers on 220 nm-SOI platformProceedings paper