Impact of design factors and environment on the electrostatic discharge sensitivity of MEMS micromirrors

Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-182021-10-1820100026-2714https://imec-publications.be/handle/20.500.12860/17936Impact of design factors and environment on the electrostatic discharge sensitivity of MEMS micromirrorsJournal articlehttp://dx.doi.org/10.1016/j.microrel.2010.07.079