Beernaert, RoelRoelBeernaertAvci, AykutAykutAvciDe Smet, JelleJelleDe SmetDe Smet, HerbertHerbertDe SmetDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwSeveri, SimoneSimoneSeveri2021-10-182021-10-1820101071-0922https://imec-publications.be/handle/20.500.12860/16721Novel analog pulse-width-modulated 15-μm SiGe micromirrorsJournal articlehttp://dx.doi.org/10.1889/JSID18.10.855