Devriendt, KatiaKatiaDevriendtRedolfi, AugustoAugustoRedolfiShamiryan, DenisDenisShamiryanBoullart, WernerWernerBoullart2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15237Dry etch of bulk Si FinFET structures with tunable CDMeeting abstract