Li, JiajingJiajingLiRincon Delgadillo, PaulinaPaulinaRincon DelgadilloSuh, Hyo SeonHyo SeonSuhMannaert, GeertGeertMannaertNealey, Paul F.Paul F.Nealey2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33424Kinetics of defect annihilation in chemo-epitaxy directed self-assemblyProceedings paperhttps://doi.org/10.1117/12.2514731