Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation

Astoreca, LauraLauraAstorecaSchaubroeck, DavidDavidSchaubroeckTabaei, Parinaz Saadat EsbahParinaz Saadat EsbahTabaeiGhobeira, RoubaRoubaGhobeiraMorent, RinoRinoMorentDe Geyter, NathalieNathalieDe GeyterOp de Beeck, MaaikeMaaikeOp de BeeckDe Smet, HerbertHerbertDe Smet2022-06-162021-12-092022-06-1620212079-6412WOS:000724811300001https://imec-publications.be/handle/20.500.12860/38582Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma ActivationJournal article10.3390/coatings11111352WOS:000724811300001ATOMIC LAYER DEPOSITIONBPDA-PPD POLYIMIDEALUMINUM-OXIDESURFACE MODIFICATIONBARRIER PROPERTIESAL2O3POLYMERGROWTHFILMSTIO2