An (un)solvable problem in SIMS: B-interfacial profiling

Vandervorst, WilfriedWilfriedVandervorstJanssens, TomTomJanssensLoo, RogerRogerLooCaymax, MattyMattyCaymaxPeytier, IvanIvanPeytierLindsay, RichardRichardLindsayFruehauf, JensJensFruehaufBergmaier, A.A.BergmaierDollinger, G.G.Dollinger2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8331An (un)solvable problem in SIMS: B-interfacial profilingJournal article