CAD-oriented analytic formulas for self and mutual capacitance of interconnects on an Si-SiO2 substrate

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaexVandenberghe, S.S.VandenbergheDe Roest, DavidDavidDe RoestStucchi, MicheleMicheleStucchi2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5863CAD-oriented analytic formulas for self and mutual capacitance of interconnects on an Si-SiO2 substrateProceedings paper