Effective electrical passivation of Ge(100) for high-k gate dielectric layers using germanium oxide

Delabie, AnneliesAnneliesDelabieBellenger, FlorenceFlorenceBellengerHoussa, MichelMichelHoussaConard, ThierryThierryConardVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsMeuris, MarcMarcMeuris2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12035Effective electrical passivation of Ge(100) for high-k gate dielectric layers using germanium oxideJournal article