Nanometer scale characterization of deep submicron devices

Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseDuhayon, NatasjaNatasjaDuhayonEyben, PierrePierreEybenHantschel, ThomasThomasHantschelTrenkler, ThomasThomasTrenklerXu, MingweiMingweiXu2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4879Nanometer scale characterization of deep submicron devicesOral presentation