Pobedinskas, PauliusPauliusPobedinskasDegutis, GiedriusGiedriusDegutisDexters, WimWimDextersRuttens, BartBartRuttensD'Haen, JanJanD'HaenHardy, AnAnHardyVan Bael, MarliesMarliesVan BaelHaenen, KenKenHaenen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24390Influence of CVD diamond growth plasma on AIN thin filmsOral presentation