Ruiz Aguado, DanielDanielRuiz AguadoGovoreanu, BogdanBogdanGovoreanuFavia, PaolaPaolaFaviaDe Meyer, KristinKristinDe MeyerVan Houdt, JanJanVan Houdt2021-10-172021-10-172008-03https://imec-publications.be/handle/20.500.12860/14404Impact of the high-temperature process steps on the HfAIO interpoly dielectric stacks for nonvolatile memory applicationsProceedings paper