Temst, K.K.TemstVan Bael, M.J.M.J.Van BaelSwerts, J.J.SwertsLoosvelt, H.H.LoosveltPopova, E.E.PopovaBuntinx, D.D.BuntinxBekaert, JoostJoostBekaertVan Haesendonck, C.C.Van HaesendonckBruynseraede, Y.Y.BruynseraedeJonckheere, RikRikJonckheereFritzsche, H.H.Fritzsche2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9670Polarized neutron reflectometry on lithographically patterned thin film structuresJournal article