Direct comparison of Si/high-k and Si/SiO2 channels in advanced FD SOI MOSFETs

Pham-Nguyen, L.L.Pham-NguyenFenouillet-Beranger, C.C.Fenouillet-BerangerVandooren, AnneAnneVandoorenWild, A.A.WildGhibaudo, G.G.GhibaudoCristoloveanu, S.S.Cristoloveanu2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14313Direct comparison of Si/high-k and Si/SiO2 channels in advanced FD SOI MOSFETsProceedings paper