Claes, TomTomClaesJansen, RoelofRoelofJansenNeutens, PieterPieterNeutensDu Bois, BertBertDu BoisHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriVan Dorpe, PolPolVan DorpeDeshpande, ParuParuDeshpandeRottenberg, XavierXavierRottenberg2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23655Large-scale characterization of silicon nitride-based evanescent couplers at 532nm wavelengthProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2052453