Barozzi, MarioMarioBarozziIacob, EEIacobvan den Berg, J.A.J.A.van den BergReading, M.A.M.A.ReadingAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciTielens, HildeHildeTielensBersani, M.M.Bersani2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18532TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFMMeeting abstract