Mid-IR devices and sub-systems based on SOI technology

Pavanello, FabioFabioPavanelloVasiliev, AntonAntonVasilievWang, RuijunRuijunWangMuneeb, MuhammadMuhammadMuneebMalik, Aditya SinghAditya SinghMalikLepage, GuyGuyLepageDe Heyn, PeterPeterDe HeynVan Campenhout, JorisJorisVan CampenhoutSimonyte, I.I.SimonyteVizbaras, K.K.VizbarasBaets, RoelRoelBaetsRoelkens, GuntherGuntherRoelkens2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33758Mid-IR devices and sub-systems based on SOI technologyMeeting abstract