Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth

Karim, MarwaMarwaKarimMartini, RobertoRobertoMartiniSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanDepauw, ValerieValerieDepauwVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenRamadan, WegdanWegdanRamadanGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24034Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growthProceedings paperhttp://the-psst.com/psst2014/ISO%20B5%20libro%20PSST%202014-%20corrected%2020%20feb%202014.pdf