Yoshida, ShinichiShinichiYoshidaLin, DennisDennisLinVais, AbhitoshAbhitoshVaisAlian, AliRezaAliRezaAlianFranco, JacopoJacopoFrancoEl Kazzi, SalimSalimEl KazziMols, YvesYvesMolsMiyanami, YukiYukiMiyanamiNakazawa, MasashiMasashiNakazawaCollaert, NadineNadineCollaertWatanabe, HHWatanabeThean, AaronAaronThean2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/27636Systematic study of interfacial reactions induced by metal electrodes in high-k/InGaAs gate stacksJournal articlehttp://scitation.aip.org/content/aip/journal/apl/109/17/10.1063/1.4965854