B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

Rengo, GianlucaGianlucaRengoPorret, ClémentClémentPorretHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelAyyad, MustafaMustafaAyyadMorris, RichardRichardMorrisKhazaka, RamiRamiKhazakaLoo, RogerRogerLooVantomme, AndreAndreVantomme2023-05-042023-05-0420222162-8769WOS:000761339200001https://imec-publications.be/handle/20.500.12860/41545B and Ga Co-Doped Si1-xGex for p-Type Source/Drain ContactsJournal article10.1149/2162-8777/ac546eWOS:000761339200001BORONCMOS