IMEC N7, N5 and beyond: DTCO, STCO and EUV insertion strategy to maintain affordable scaling trend

Kim, Ryan Ryoung hanRyan Ryoung hanKimSherazi, YasserYasserSheraziDebacker, PeterPeterDebackerRaghavan, PraveenPraveenRaghavanRyckaert, JulienJulienRyckaertMallik, ArindamArindamMallikVerkest, DiederikDiederikVerkestLee, Jae UkJae UkLeeGillijns, WernerWernerGillijnsTan, Ling EeLing EeTanBlanco, VictorVictorBlancoRonse, KurtKurtRonseMcIntyre, GregGregMcIntyre2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31057IMEC N7, N5 and beyond: DTCO, STCO and EUV insertion strategy to maintain affordable scaling trendProceedings paperhttps://doi.org/10.1117/12.2293500