Foubert, PhilippePhilippeFoubertShite, HideoHideoShiteNafus, KathleenKathleenNafusHermans, JanJanHermansHendrickx, EricEricHendrickx2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18920EUV baseline process optimizations for NXE:3100 evaluationProceedings paper