Baklanov, MikhaïlMikhaïlBaklanovKondoh, EiichiEiichiKondohLinskens, FrankFrankLinskensGidley, D. W.D. W.GidleyLee, Hean-ChealHean-ChealLeeMogilnikov, K. P.K. P.MogilnikovSune, JorgeJorgeSune2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5034Comparative study of porous SOG films with different non-destructive instrumentationProceedings paper