David, M.L.M.L.DavidPailloux, F.F.PaillouxBabonneau, D.D.BabonneauDrouet, M.M.DrouetBarbot, J.F.J.F.BarbotSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11938The effect of the substrate temperature on extended defects created by hydrogen implantation in germaniumJournal article