Kwakman, LaurensLaurensKwakmanKenslea, AnneAnneKensleaJohanesen, HayleyHayleyJohanesenStrauss, MichaelMichaelStraussBoullart, WernerWernerBoullartMertens, HansHansMertensSiew, Yong KongYong KongSiewBarla, KathyKathyBarla2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33350Statistical significance of STEM based metrology on advanced 3D transistor structuresProceedings paperhttps://doi.org/10.1117/12.2514963