Single-layer SiGe infrared wide-band microemitter arrays by MEMS technology

Malyutenko, VolodymyrVolodymyrMalyutenkoMalyutenko, OlegOlegMalyutenkoLeonov, VladimirVladimirLeonovVan Hoof, ChrisChrisVan Hoof2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15797Single-layer SiGe infrared wide-band microemitter arrays by MEMS technologyProceedings paper