Musschoot, J.J.MusschootXie, Q.Q.XieDeduytsche, D.D.DeduytscheDe Keyser, K.K.De KeyserLongrie, D.D.LongrieHaemers, J.J.HaemersVan den Berghe, S.S.Van den BergheVan Meirhaeghe, R.L.R.L.Van MeirhaegheD'Haen, JanJanD'HaenDetavernier, C.C.Detavernier2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17666Texture of atomic layer deposited rutheniumJournal article