Stephenson, RobertRobertStephensonVerhulst, AnneAnneVerhulstDe Wolf, PeterPeterDe WolfCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3855Non-monotonic behaviour of the scanning capacitance microscope for large dynamic range samplesProceedings paper