Chiodarelli, NicoloNicoloChiodarelliKellens, KristofKristofKellensCott, DaireDaireCottPeys, NickNickPeysArstila, KaiKaiArstilaHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15093Integration of vertical carbon nanotube bundles for interconnectsProceedings paper