Iacopi, FrancescaFrancescaIacopiBrongersma, SywertSywertBrongersmaMaex, KarenKarenMaexAbell, ThomasThomasAbell2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6418Buckling instabilities of thin cap layers deposited onto low-k dielectric filmsOral presentation