Surface passivation of silicon by means of negative charge dielectrics

Agostinelli, GuidoGuidoAgostinelliVitanov, P.P.VitanovAlexieva, Z.Z.AlexievaHarizanova, A.A.HarizanovaDekkers, HaroldHaroldDekkersDe Wolf, StefaanStefaanDe WolfBeaucarne, GuyGuyBeaucarne2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8471Surface passivation of silicon by means of negative charge dielectricsProceedings paper