Ge1-x Sn (x) nanodots crystal nuclei for solid phase crystallization of poly-Si1-x-y Ge (x) Sn (y)

Shirai, YuseiYuseiShiraiTatsuoka, HirokazuHirokazuTatsuokaShimura, YosukeYosukeShimura2023-03-232022-12-172023-01-102023-03-2320230021-4922WOS:000893191400001https://imec-publications.be/handle/20.500.12860/40883Ge1-x Sn (x) nanodots crystal nuclei for solid phase crystallization of poly-Si1-x-y Ge (x) Sn (y)Journal article10.35848/1347-4065/aca20eWOS:000893191400001