Rafi, Joan MarcJoan MarcRafiSimoen, EddyEddySimoenClaeys, CorCorClaeysUlyashin, AliaksandrAliaksandrUlyashinHuang, Y.L.Y.L.HuangJob, R.R.JobLauwaert, J.J.LauwaertClauws, P.P.Clauws2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9490Combined electrical and spectroscopic investigation of thermal donor formation in plasma-hydrigenated n-type czochralski siliconMeeting abstract