A comprehensive study of MOVPE growth on 200 mm GaN-on-SOI for monolithic integrated GaN ICs

Zhao, MingMingZhaoGeens, KarenKarenGeensLi, XiangdongXiangdongLiAmirifar, NooshinNooshinAmirifarDecoutere, StefaanStefaanDecoutere2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37414A comprehensive study of MOVPE growth on 200 mm GaN-on-SOI for monolithic integrated GaN ICsMeeting abstract