CMOS based probe arrays for electronic depth control

Seidl, KarstenKarstenSeidlTorfs, TomTomTorfsRuther, PatrickPatrickRutherPereira Neves, HerculesHerculesPereira Neves2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16191CMOS based probe arrays for electronic depth controlProceedings paper