Jourdain, AnneAnneJourdainPhommahaxay, AlainAlainPhommahaxayVerbinnen, GreetGreetVerbinnenGuerrero, AliceAliceGuerreroBailey, SusanSusanBaileyPrivett, MarkMarkPrivettArnold, KimKimArnoldMiller, AndyAndyMillerRebibis, Kenneth JuneKenneth JuneRebibisBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24018Temporary bonding for high-topography applications: spin-on material versus dry filmProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6897393&contentType=Conference+Publications