Impact of Processing Factors on the Low-Frequency Noise of Gate-All-Around Silicon Vertical Nanowire FETs

Simoen, EddyEddySimoenMatagne, PhilippePhilippeMatagneVeloso, AnabelaAnabelaVelosoClaeys, CorCorClaeys2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37180Impact of Processing Factors on the Low-Frequency Noise of Gate-All-Around Silicon Vertical Nanowire FETsProceedings paperhttps://doi.org/10.1149/10404.0003ecst