Kim, Min-SooMin-SooKimPopovici, Mihaela IoanaMihaela IoanaPopoviciSwerts, JohanJohanSwertsPawlak, MalgorzataMalgorzataPawlakTomida, KazuyukiKazuyukiTomidaKaczer, BenBenKaczerOpsomer, KarlKarlOpsomerSchaekers, MarcMarcSchaekersTielens, HildeHildeTielensVrancken, ChristaChristaVranckenVan Elshocht, SvenSvenVan ElshochtDebusschere, IngridIngridDebusschereAltimime, LaithLaithAltimimeKittl, JorgeJorgeKittl2021-10-192021-10-192011-05https://imec-publications.be/handle/20.500.12860/19177Advanced capacitor dielectrics: towards 2x nm DRAMProceedings paper