Characterization of high-throughput spatial ALD Al2O3 as surface passivation for industrial local Al BSF Si solar cells

Vermang, BartBartVermangGoverde, HansHansGoverdeRothschild, AudeAudeRothschildJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertensVermont, P.P.VermontVanormelingen, KoenKoenVanormelingenGranneman, E.H.A.E.H.A.Granneman2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20073Characterization of high-throughput spatial ALD Al2O3 as surface passivation for industrial local Al BSF Si solar cellsProceedings paper