Wafer-scale growth of graphene on Ge and Si wafers by reduced-pressure chemical vapor deposition

Porret, ClémentClémentPorretLuraschi, ClaudioClaudioLuraschiNuytten, ThomasThomasNuyttenWu, XiangyuXiangyuWuAsselberghs, IngeIngeAsselberghsVerguts, KenKenVergutsDe Gendt, StefanStefanDe GendtBrems, StevenStevenBremsHuyghebaert, CedricCedricHuyghebaertLoo, RogerRogerLoo2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29206Wafer-scale growth of graphene on Ge and Si wafers by reduced-pressure chemical vapor depositionMeeting abstract