Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detection

Cuyvers, StijnStijnCuyversHermans, ArturArturHermansKiewiet, MaxMaxKiewietGoyvaerts, JeroenJeroenGoyvaertsRoelkens, GuntherGuntherRoelkensVan Gasse, KasperKasperVan GasseVan Thourhout, DriesDriesVan ThourhoutKuyken, BartBartKuyken2023-05-042023-05-0420220146-9592WOS:000756709400052https://imec-publications.be/handle/20.500.12860/41544Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detectionJournal article10.1364/OL.447636WOS:000756709400052HIGH-SPEEDPHOTODETECTORMEDLINE:35167563