Sayan, SafakSafakSayanTao, ZhengZhengTaoDe Simone, DaniloDaniloDe SimoneVandenberghe, GeertGeertVandenberghe2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27274EUV extendibility via dry development rinse processProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2513824