Process-oriented modelling of stresses and mechanical confinement in advanced nano-interconnects; implications for electromigration

Zahedmanesh, HoumanHoumanZahedmaneshCroes, KristofKristofCroesTokei, ZsoltZsoltTokei2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/30002Process-oriented modelling of stresses and mechanical confinement in advanced nano-interconnects; implications for electromigrationMeeting abstracthttp://www.mam-conf.org/content/dam/enas/mam-conf/en/MAM%202017%20Program.pdf