Degraeve, RobinRobinDegraeveAoulaiche, MarcMarcAoulaicheKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselKauerauf, ThomasThomasKaueraufSahhaf, SaharSaharSahhafGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13641Review of reliability issues in high k/metal gate stacksProceedings paper