Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films

Godavarthi, SrinivasSrinivasGodavarthiLe, Quoc ToanQuoc ToanLeVerdonck, PatrickPatrickVerdonckMardani, ShabnamShabnamMardaniVanstreels, KrisKrisVanstreelsVan Besien, ElsElsVan BesienBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/22403Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k filmsJournal article