Shohjoh, T.T.ShohjohIkota, M.M.IkotaIsawa, M.M.IsawaLorusso, GianGianLorussoHoriguchi, NaotoNaotoHoriguchiBriggs, BasoeneBasoeneBriggsMertens, HansHansMertensBogdanowicz, JanuszJanuszBogdanowiczDe Bisschop, PeterPeterDe BisschopCharley, Anne-LaureAnne-LaureCharley2022-07-122022-07-092022-07-1220212380-9248WOS:000812325400209https://imec-publications.be/handle/20.500.12860/40097Inspection and metrology challenges for 3 nm node devices and beyondProceedings paper10.1109/IEDM19574.2021.9720711978-1-6654-2572-8WOS:000812325400209