Wang, BoBoWangTanaka, ShujiShujiTanakaGuo, BinBinGuoVereecke, GuyGuyVereeckeSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-192021-10-1920110026-2714https://imec-publications.be/handle/20.500.12860/20126Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMSJournal articlehttp://dx.doi.org/10.1016/j.microrel.2011.06.022