Rottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansenVerheyen, PeterPeterVerheyenVan Hoof, RitaRitaVan HoofVerbist, AgnesAgnesVerbistTilmans, HarrieHarrieTilmans2021-10-192021-10-192011-06https://imec-publications.be/handle/20.500.12860/19712Engineering of acoustic meta-materials with application to MEMS BAW resonatorsProceedings paper