Au-free ohmic contacts for AlGaN/GaN power devices on 200 mm Si substrates

Firrincieli, AndreaAndreaFirrincieliDe Jaeger, BriceBriceDe JaegerYou, ShuzhenShuzhenYouWellekens, DirkDirkWellekensVan Hove, MarleenMarleenVan HoveDecoutere, StefaanStefaanDecoutere2021-10-222021-10-2220140021-4922https://imec-publications.be/handle/20.500.12860/23816Au-free ohmic contacts for AlGaN/GaN power devices on 200 mm Si substratesJournal articlehttp://iopscience.iop.org/1347-4065/53/4S/04EF01/4065/53/4S/04EF01/