Taylor, A.A.TaylorFendrych, F.F.FendrychFekete, L.L.FeketeVlcek, J.J.VlcekRezacova, V.V.RezacovaPetrak, V.V.PetrakKrucy, J.J.KrucyNesladek, MilosMilosNesladekLiehr, M.M.Liehr2021-10-192021-10-1920110925-9635https://imec-publications.be/handle/20.500.12860/19875Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growthJournal article